Sensitivity analysis involves selecting key design parameters and critical performance criteria and studying the effect of variation. Download it once and read it on your kindle device, pc, phones or tablets. Modelbased control concepts for vibratory mems gyroscopes. Leading manufacturer of highperformance inertial sensors, including tactical grade, coriolis vibratory gyroscopes and navigation grade, quartz servo. Microelectromechanical systems mems vibratory gyroscopes are among the most commercialized mems products. Us6046531a vibrator, vibratory gyroscope, and linear. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of mems gyroscope. Micro mechanical transducers, volume 8 1st edition elsevier. Theory and design kindle edition by apostolyuk, vladislav.
A unique balance between theory and practical design issues. Vibration frequencies of beam by differential equation method. Pdf modeling and simulation of the mems vibratory gyroscope. Mems vibratory gyroscope graduation project thesis 1 faculty of engineering ain shams university in partial fulfillment of the requirements for the degree bachelor of science in communication systems engineering submitted byabdel rahman elnaggar, ahmed magdy, ahmed m. In order to adapt the mpc to track period ic reference signals with zero steadystate error, the. In practical implementations of vibratory rate gyroscopes stabilization of the drivemode velocity is desired to reduce the effect of manufacturing tolerances and operational conditions on the scale factor of the sensor.
A vibrating structure gyroscope, defined by the ieee as a coriolis vibratory gyroscope cvg, is a gyroscope that uses a vibrating structure to determine the rate of rotation. Vibration sensitivity analysis of mems vibratory ring. This paper presents a novel adaptive approach that can identify, in an online fashion, angular rate and other system parameters. This paper is dealing with modeling, tuning and simulation of standing wave control and information. Vibratory gyroscope article about vibratory gyroscope by. Posted saturday, september 16, 2017 this application note gives an overview of different control mechanisms for mems coriolis vibratory gyroscopes cvg and how they are implemented using the commercial offtheshelf hf2li lockin amplifier. A vibrating structure gyroscope, defined by the ieee as a coriolis vibratory gyroscope cvg, is a gyroscope that uses a vibrating structure to determine the rate. Mems vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of. Theory and design of micromechanical vibratory gyroscopes. Pdf dynamics of micromechanical coriolis vibratory. In microelectromechanical vibratory gyroscopes, feedback control is a common strategy in attempting to correct the imperfections. Overview a tuning fork mems gyroscope is designed with a perforated proof mass. A vibrating structure gyroscope functions much like the halteres of flies insects in the order diptera the underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even.
Us6046531a us09108,500 us10850098a us6046531a us 6046531 a us6046531 a us 6046531a us 10850098 a us10850098 a us 10850098a us 6046531 a us6046531 a us 6046531a authority us unite. Design and vibration sensitivity analysis of a mems tuning. A simplified model of vibratory gyros is shown in figure 1. All vibratory gyroscopes are based on the transfer of energy between two vibration modes of a structure caused by coriolis acceleration. They represent an important inertial technology because. Theory and design of micromechanical vibratory gyroscopes 175 oscillatory continuous discrete multiple single hrg ring tuning fork single mass beam gimballed wheel rotary dtg figure 2. A mems gyroscope is a micromachined inertial device that can be used to measure the angular rate of rotation or the angle of orientation. Micromechanical vibratory gyroscopes or angular rate sensors have a large potential for different types of applications as primary information sensors for guidance, control and navigation systems. Mems vibratory gyroscopes provides a solid foundation in the theory and. Design and analysis of a mems comb vibratory gyroscope haifeng dong, xingguo xiong department of electrical and computer engineering, university of bridgeport, bridgeport, ct 06604 abstract mems microelectromechanical systems refer to devices or systems integrated with electrical and mechanical components in the scale of microns. Parallel power electronics filters in threephase fourwire systems. System identification of mems vibratory gyroscope sensor. Structural approaches to improve robustness mems reference shelf.
It runs almost silently on precision stainless steel miniature ball bearings. Sensitivity analysis of an inplane mems vibratory gyroscope. Ring gyroscopes are believed to be relatively vibrationinsensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. A read is counted each time someone views a publication summary such as the title, abstract, and list of authors, clicks on a figure, or views or downloads the fulltext.
This book was written as a response to a lack of publications offering easily understandable information on gyroscopes. Simulation of the mems vibratory gyroscope through simulink. Control of mems coriolis vibratory gyroscopes eeweb. Fabrication defects and perturbations affect the behavior of a vibratory mems gyroscope sensor, which makes it difficult to measure the rotation angular rate. Momeni tarbiat modares university, faculty of engineering, control systems department, tehran, iran abstractthis paper presents a systematic approach to obtain governing equations of micro electro mechanical gyroscopes. Mems vibratory gyroscopes structural approaches to improve. In the first part, the dynamics of the vibratory gyroscope sensing element is. Planar vibratory gyroscopes hughes electronics corporation. Feng and fan 10 presented an adaptive estimatorbased technique to estimate the angular motion by providing the coriolis force as the input to the adaptive estimator and to improve the bandwidth of. Modelling of mems vibratory gyroscopes utilizing phase detection a. Thesis 1 mems vibratory gyroscope and readout circuit. A general approach to the analysis of the dynamics of different types of micromechanical vibratory gyroscopes is considered in this paper. The micromachined gyroscopes of this class are expected to.
Ece, tongji university, shanghai, china, june, 2005 042009 thesis advisor. Memsis normallyconsidered as devices and systems integrated with mechanical elements, actuators, sensors and electronic circuits on a common silicon substrate through micro fabrication technology 3. Design and analysis of a mems comb vibratory gyroscope. Although all vibratory mems gyroscopes rely on the rotationinduced coriolis force, the operating modes of the two technologies are different.
The architecture of type b is the same with as that of type a, except for the. To understand why consumer tuningfork architecture performs poorly against baw technology it is important to understand the fundamental difference between the two technologies. With the aid of illustrations you will be shown the principles of gyroscopes including precession and nutation, where and how gyroscopes are used. Design and analysis of a novel fully decoupled triaxis. Mems vibratory gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Mems vibratory gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. Based on university gyroscopes from the 19th century this gyroscope is over 12 inches tall and is made from solid brass. However, it seems that many of problems and difficulties for designing the micro gyroscopes still remain. Digital rate mems vibratory gyroscope modeling, tuning and simulation results valerii v. High grade coriolis vibratory gyroscopes for stabilisation control. This book aims to fill the gap between dictionary definitions and the all too often highly mathematical books on gyroscopes. The perforation enables the release of the proof mass during etching process in the fabrication. By popular demand we have produced another version of our lecture gyroscope.
Typically a mems vibratory gyroscope can be modeled as a twodimensional oscillator. System modeling of mems gyroscopes ramyar rashed and h. In the problem of control ling vibratory gyroscopes, tracking of periodic referenc e signals is required. This study deals with such design problems on micromachined gyroscopes. Model of sense channel in mems vibratory gyroscopes.
Micromachined gyroscopes are suitable for familiar products such as a vtr, auto mobile and toy, where cost effective and mass production are required. Principle, control and design thermal transport in strongly correlated rareearth intermetallic compounds signal integrity. Mscengmech march2008 this thesis aims to contribute to themodellingand analysisofmems gyroscope technologies. There are bar and rotor types of vibratory gyroscope. Kugi, modelbased control concepts for vibratory mems gyroscopes, mechatronics,22,3,241250,2012.
Model predictive control of mems vibratory gyroscope. Vibratory gyroscope an instrument for determining the angular velocity of an object. A planar vibratory member of these structures has a hollow. Active structural error suppression in mems vibratory rate. Evaluating error sources during mems gyroscope selection.
Vibratory gyroscopes generate momentum by vibrating structures again, conservation of momentum leads to mechanisms for measuring rotation rate and orientation example. As discussed in the next section, vibrations at the inphase frequency of the device can disturb or prevent gyroscope operation. It is a highly symmetric structure consisting of four identical big frames distributed on the four sides of the structure. Whilst many of the sensors in this class are strictly angular rate sensors and not gyroscopes in the sense that they do not rely on the dynamical properties of rotating bodies, it has become accepted that all such devices be referred to as gyroscopes since. Control of mems coriolis vibratory gyroscopes page 3 4 where y is the amplitudedecay time constant given by for ideal case when. Structural approaches to improve robustness mems reference shelf acar, cenk, shkel, andrei on. The schematic of the proposed triaxis gyroscope structure is shown in figure 1 and summarized in table 1. This article discusses the various control mechanisms for mems coriolis vibratory gyroscopes cvg, and how they can be applied with the commercial offtheshelf hf2li lockin amplifier. Mems vibratory gyroscopes structural approaches to. Acar et al environmentally robust mems vibratory gyroscopes for automotive applications 1897 to meet strict speci. Specifically, we investigate and analyse the dynamics of. Vibratory gyroscopes basic vibratory gyroscope operation.
Designs that were used to produce micromechanical gyroscopes are shown in. Modelling of mems vibratory gyroscopes utilizing phase. Planar vibratory gyroscope structures are provided which are inherently symmetric, which facilitate the use of simple monolithic fabrication processes and which enable the use of sensitive control and sense systems. The proof mass used in the design enables the reduction of damping effect. Design and simulation of mems comb vibratory gyroscope. Coriolis vibratory gyroscopes theory and design vladislav. Applied electromagnetics and professional practice romansy. This is accomplished by an electronic feedback system which. Theory and design of micromechanical vibratory gyroscopes, 2006. The type a architecture is a dualmass structure where the left mass and right mass are symmetrical, as depicted in figure 1 a, which shows two identical masses, a lever beam and an anchored diamond coupling spring. Selvakumar rajalakshmi engineering college, chennai 602105 india. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common microfabrication. System modeling of a mems vibratory gyroscope and integration to. Digital rate mems vibratory gyroscope modeling, tuning and.
Micromachined electromechanical system mems gyroscopes. This paper presents a detailed model for possible vibration effects on mems degenerate gyroscopes represented by vibratory ring gyroscopes. Use features like bookmarks, note taking and highlighting while reading coriolis vibratory gyroscopes. Thesis 1 mems vibratory gyroscope and readout circuit 1. However, a purely feedback control can be insufficient for compensation of all the errors, requiring post processing in the form of laser trimming to achieve higher levels of performance. Tuning fork, comb vibratory gyroscope, mems micro electro mechanical systems, intellisuite. Dreyer department of mechanicalandmechatronic engineering, university ofstellenbosch, private bag x1,7602matieland,southafrica thesis. Mechanical and electrical noise in sense channel of mems. Two kinds of tfgs are designed in this paper according to the previous work. The sensing element in the bar type is formed by several vibrating objects similar to the bars of a tuning fork.